9 results
Cu Deposition Characteristics into Submicron Contact Holes Employing Self-Sputtering With a High Ionization Rate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 427 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 185
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- 1996
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Electromigration Characteristics of Cu and Al Interconnections
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- Journal:
- MRS Online Proceedings Library Archive / Volume 338 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 441
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- 1994
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Tem Observation of the Damages in Heavily Ion-Implanted Fine Si Columns
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 641
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- 1994
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Digital Chemical Vapor Deposition of Silicon Oxide/Nitride and its Surface Reaction Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 169
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- 1992
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Digital Process for advanced VLSI's and Surface Reaction Study
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- Journal:
- MRS Online Proceedings Library Archive / Volume 222 / 1991
- Published online by Cambridge University Press:
- 16 February 2011, 195
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- 1991
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Recent Progress in Excimer Laser Lithography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 101 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 3
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- 1987
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Microfabrication Technologies for Advanced VLSI Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 17
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- 1986
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Microfabrication Technologies for Advanced VLSI Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 76 / 1986
- Published online by Cambridge University Press:
- 25 February 2011, 39
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- 1986
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Single-Crystal Silicon Etching Characteristics Using Excimer Laser Cℓ2 GAS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 29 / 1983
- Published online by Cambridge University Press:
- 21 February 2011, 167
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- 1983
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